Thermal management for a solid immersion lens objective in optical probing

ABSTRACT

A method for thermal management of a solid immersion lens is described. In one example, a method includes applying a lens tip assembly of a solid immersion lens to a device under test, focusing an image of the device under test on an optical probe, applying a first thermally controlled fluid to a first heat exchanger thermally coupled to the objective near the lens tip assembly, applying a second thermally controlled fluid to a second heat exchanger thermally coupled to the objective farther from the lens tip assembly than the first heat exchanger, to independently alternately heat or cool a portion of the objective different from that of the first heat exchanger.

CROSS-REFERENCE TO RELATED APPLICATION

The present application is a Divisional of U.S. patent application Ser.No. 12/646,358, filed on Dec. 23, 2009 now U.S. Pat. No. 8,144,406,entitled “THERMAL MANAGEMENT FOR A SOLID IMMERSION LENS OBJECTIVE INOPTICAL PROBING”, the priority of which is hereby claimed.

FIELD

The present description relates to the field of optically probingmicroelectronic and micro-mechanical devices and, in particular, to thethermal management of an optical probe.

BACKGROUND

As a part of the development and design of an integrated circuit (IC)chip, prototype chips are made in small volumes and tested. In one typeof test, inputs are supplied to the chip and the outputs are thencompared to what the chip is supposed to provide. This allows specificparts of the chip to be checked, tested and debugged before volumeproduction begins. When problem areas are found, these parts of the chipare exposed to more rigorous testing. One type of rigorous testing is toaim an optical probe at a problem area and observe the problem areawhile the chip is being operated. Optical probes can also be helpfulwhen the production process changes or to improve quality or yieldduring production.

It is important during such observations to operate the chip at all ofthe temperatures for which it is designed. A chip that might runproperly by design at room temperature might fail when it isparticularly cold or hot. This type of testing may be particularlyimportant for chips in mobile devices that often lack fans, heaters, andstable room temperatures. Such devices often have extended temperaturerequirements. Some products may require reliable operation attemperatures ranging from −40 to +110 C. The optical probe musttherefore be able to operate through this temperature range.

In addition, optical silicon debug is trending towards more sightings atcold temperatures including, less than 10 C and even sub-zero junctiontemperatures. There is a need for probing low power devices. Some suchdevices have such low power that they that cannot self-heat. Hotjunction temperatures above the current 60 C optical probe operatingtemperature range are also being tested.

Current optical probes use a liquid immersion lens (LIL) in conjunctionwith a diamond window to get beyond a 10 C-60 C temperature range. TheLIL limits productivity and capability because it does not have enoughresolution to image small features on the chip. As technology moves from32 nm to 22 nm process technology and beyond, a LIL becomes unable toresolve many of the important features and solid immersion lenses (SIL)are being considered.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present invention are illustrated by way of example,and not limitation, in the figures of the accompanying drawings in whichlike reference numbers are used to refer to like features, and in which:

FIG. 1 is an exploded diagram of lens with thermal management featuresaccording to an embodiment of the present invention;

FIG. 2 is a perspective view of the lens assembled according to anembodiment of the present invention;

FIG. 3A is a cross-sectional diagram of a lens with a thermal managementheat exchanger according to an embodiment of the present invention;

FIG. 3B is a cross-sectional diagram of a lens with a dry gas purgesystem according to an embodiment of the present invention;

FIG. 3C is a cross-sectional diagram of a lens with a thermal managementheat exchanger and a dry purge gas system according to an embodiment ofthe present invention;

FIG. 4A is a cross-sectional diagram of an optical debug tool with alens according to an embodiment of the present invention;

FIG. 4B is a cross-sectional diagram of an optical debug tool with alens according to another embodiment of the present invention;

FIG. 5 is a graph of thermal conditions of the debug tool of FIG. 4; and

FIG. 6 is a block diagram of a microelectronic and micromechanicaloptical test system according to an embodiment of the invention.

DETAILED DESCRIPTION

The resolution of a SIL (Solid Immersion Lens) allows many post silicondebug and validation activities to occur for both 32 nm and 22 nmprocesses. Current SIL designs are typically intended for use at roomtemperature because the materials within the SIL expand and contractwith temperature at different rates. The expansion and contraction candamage the SIL. In addition, at cooler temperatures (e.g. less than 10C) and moist environments, condensation forms on the back of the lenstip that prevents imaging and waveform acquisition.

Because the SIL is designed to operate in a limited temperature rangeand safe thermal environment, a thermal management method and a drypurge scheme can be used to protect the SIL from extremely cold (−130 C)and extremely hot (+230 C) thermal environments. This helps preventimage degradation for the optical sensors that rely on the SIL. It alsohelps to avoid physical damage to the SIL. Effective thermal managementcan allow waveform acquisition at extreme hot and cold junctiontemperatures for a range of different optical probers. Some such opticalprobe technologies include laser voltage probes, time resolved emission,laser assisted device alteration, and infrared emission microscopy.

A SIL is not inherently able to operate at extreme hot and coldtemperatures. The SIL can be damaged due to coefficient of thermalexpansion mismatches in the dissimilar materials of the SIL. Runningtemperature controlled fluid through a SIL heat exchanger and a lensmounting block provides thermal control and isolation from extremethermal environments that can occur while the SIL is being used in aprobe or debug operation. Running a dry nitrogen gas purge into the SILobjective prevents condensation on the inner surface of the SIL tip andprevents image degradation.

According to some embodiments of the present invention, the lenstemperature of a SIL is controlled by convective cooling-based thermalmanagement hardware that is wrapped around the outer diameter of the SILor its base or both. A flow and pressure controlled compressed dry air(CDA) or nitrogen (N2) gas is run to purge the SIL's internal assemblyto prevent condensation or icing on the back of the SIL tip. Thisthermal management solution keeps the SIL objective temperature within asafe operating range, allowing it to function without condensationforming on the SIL tip.

Embodiments of the present invention may be applied for any extremetemperature conductive or fluidic (liquid, air, or other gas) convectivethermal environment, e.g. jet impingement cooling, spray cooling,laminar/turbulent flow, conductive cooling (diamond windows or copperbased heat sinks), or any other cooling technologies. In the examplesdescribed below, a type of air based jet impingement termed “convectivecooling”, abbreviated “C2” may be used as the thermal environment.

Referring to FIG. 1, a SIL assembly 10 is shown in an exploded view. TheSIL has a tip assembly 12 and an objective 14. The tip serves as aprotective cover and typically has a high transmission lens 16 of asuitable material to form a window its center through which an image ofthe device being probed passes. The objective images the device beingprobed onto an appropriate optical probe (not shown) that connects tothe left end of the assembly as shown in the drawing. Accordingly, inuse the device being probed (not shown) will be at the right in thefigure and its circuitry or structures will be imaged onto an opticalprobe (not shown) at the left in the figure.

The SIL objective is mounted in an outer cover 22 that has a variety ofprotective and mounting fixtures depending on the particular embodiment.A heat exchanger 24 attaches to the outer cover and is enclosed by afluid coupler 26. The fluid coupler conducts fluid from an outer supplyand returns the fluid through the heat exchanger. Over the end of thetip, an elastomeric, insulating cover 30 is attached and held in placearound the tip assembly by a threaded ring 32. This gasket preventsfluids used in the optical probing process from entering the casing andaffecting the SIL objective and tip assembly. The diagram of FIG. 1 issimplified for ease of understanding. A variety of connectors, threads,gaskets, springs and other attachment devices may be used to hold theparts together that are not shown in the simplified diagram.

FIG. 2 shows the components of FIG. 1 fully assembled. The SIL tipassembly 12 extends through the end of the fluid coupler 26 and is heldin place by the threaded ring 32. The objective 12 is mostly protectedby its casing 22 and the elastomeric cover 30. Other components (notshown) are concealed inside the outer covers.

FIG. 3A is a cross-sectional view of the assembly of FIG. 2 to show thestructures that are concealed in FIG. 2. In this example, a fluid heatexchanger is used without a dry purge system. As before, the SIL tipassembly 12 and its window 16 are at one end of the assembled device andthe SIL objective 14 extends through the other end. FIG. 3A shows thatthe fluid coupler 26 surrounds rings on the outside edge of the heatexchanger to create a series of channels 34 around the outer cover 22 ofthe SIL objective 14. As shown in FIG. 1, the channels extend around thecircumference of the heat exchanger 24.

The fluid coupler has two ports, 36, 38. A cooling fluid can beintroduced into one port, in the illustrated example the left port 36,and evacuated out the other port, in the illustrated example the rightport 38. More or fewer ports can be used depending on the application.The two ports couple the fluid into the heat exchanger channels 34 toaffect the temperature of the SIL objective 14. The heat exchangerchannels are thermally coupled to the SIL objective. In the illustratedexample, the heat transfer is by conduction through the outer casingthat acts as a heat spreader. However, a variety of other approaches canbe used to thermally couple the fluid to the SIL objective.

A thermal pump 55 is coupled to the ports to supply the fluid at thedesired temperature. A temperature sensor 54, for example a thermaldiode, is thermally coupled to the objective. It is coupled to thethermal pump or to some other control mechanism. The temperature sensormeasures the temperature of the objective. The thermal pump can use thisinformation to adjust the temperature of the fluid, adjust the flow rateof the fluid and adjust other parameters of the cooling system. Thisallows the thermal pump to keep the objective within its best operatingtemperature range as much as is possible.

FIG. 3B is a cross-sectional view of the assembly of FIG. 2 to show thestructures that support a dry purge system without a heat exchanger. Thesame reference numbers as in FIG. 3A refer to the same structures. Apassageway 40 on either side of the SIL objective 14 extends the entirelength of the objective to the underside or inside of the tip assembly12. The passageway 40 connects to an air gap between the SIL objectiveand the tip assembly. Opposite the tip assembly, there is an opening foreach passageway. The openings allow a fluid to be introduced on oneside, in the illustrated example the left side 42, and evacuated on theother side, in the illustrated example the right side 44. Since thepassageways are open to the gap between the objective and the tipassembly, the passageways allow this gap to be heated, cooled, rinsed,or purged, inter alia.

The left and right openings are coupled to a dry gas pump 43, such as anN2 purge pump or a compressed dry air pump that pumps a dry purge gasinto the left side opening. The pump may draw the dry purge gas out ofthe right side opening or the gas may be released to ambient through anexit. To recirculate the gas, the pump must also be equipped with aprocessing handling system to dry the air and clean it of any materialsthat may have been introduced by the SIL. Alternatively, instead of apump a reservoir or tank of compressed gas or other fluid may be used.While N2 and CDA are presently used, any fluid that is inert to the SILmaterials and capable of flushing condensation away from the interior ofthe SIL may be used. A different fluid may also be chosen for thermal,cleaning or other properties.

FIG. 3C is a cross-sectional diagram of the assembly of FIG. 2 with botha thermal heat exchanger and dry air purge system fitted. The samereference numbers are used for the same components as in FIGS. 3A and3B. A SIL may be fitted with one or the other system as shown in FIGS.3A and 3B or with both as shown in FIG. 3C, depending on theapplication. Additional thermal and environmental management systems mayalso be added to any of the three illustrated alternatives. Since thetwo systems provide different benefits, each improves the systemindependently of the other. However, when both systems are combined,greater benefits are attained. The heat exchanger extends theoperational environmental temperature range of the SIL as shown in FIG.5. The dry purge system improves the resolution of the SIL system acrossa greater range of temperatures. Together, the SIL can be used across aneven greater range of temperatures.

FIG. 4A shows an example of a SIL in an operating environment withassociated equipment. In the illustrated example, the associatedequipment is a SIL debug tool 53. In FIG. 4A, a packaged die 51 ismounted to a holder 52 to be tested. The die is the device under test(DUT). This places the die directly in front of the SIL tip assembly sothat the die can be tested, debugged, mapped, or so that some otheroptical tests can be applied. The SIL debug tool is provided only as anexample, embodiments of the present invention can be adapted todifferent types and configurations of test equipment and can be used totest different type of microelectronic and micromechanical systems.

FIG. 4A also shows a convective thermal control nozzle 46. Theconvective cooling nozzle directs heated or cooled air directly to thedie and the space around the die and can be used to heat or cool the diein order to simulate different operating conditions. An air pump 56delivers air flow at, for example, 300-600 CFH (cubic feet per hour) andat a temperature ranging from, for example, about −130 C to about +230 Cto cool or heat the die and the SIL tip assembly. There are severalalternatives to the convective cooling using an air pump such as jetimpingement cooling, spray cooling, laminar/turbulent flow cooling, etc.In addition, other liquids and gases can be used. The air exits thedebug tool 53 through an exit port 57 to the ambient. The air isconfined by a seal 49 that seals the die in a chamber with the SIL.

For testing a circuit under its conditions of normal use, the air pumpalone can typically maintain the portion of the die that is being probedwithin a temperature range of −40 C to +110 C. This is a normal range oftest operating temperatures at a junction on the microprocessor or otherIC (Integrated Circuit) that is being probed or debugged.

For cold temperature probing, for example at temperatures colder thanthe dew point of the air in the SIL objective, typically around 10 C,the image formed by the SIL objective degrades. This is caused in partby condensation on the back of the SIL tip assembly and in part by highthermal gradients across the SIL objective. In other words, the part ofthe objective closest to the cold die becomes much colder than the partof the objective opposite the die. As a result, an accurate image andsensor waveform cannot be acquired. Similarly, for hot temperatureprobing at temperatures above +110 C, the objective becomes much hottercloser to the die. Image and waveform acquisition can also becomeimpossible. The uneven heating and cooling of the SIL objective alsorisks damage to the objective.

The SIL objective can be protected and thermal gradients across the lenscan be reduced using the heat exchanger 24 and thermally conductive base61 of the debug test tool. The heat exchanger and base can prevent imagedegradation at cold temperatures, manage the thermal gradients acrossthe lens, prevent damage to the SIL objective, and reduce thermalstabilization time. The ports 36, 38 of the heat exchanger 24 and baseare coupled to connecting pipes through which a thermally controlledfluid is pumped. A fluid pump 55 is coupled to both pipes to pump heatedor cooled fluid through the base and heat exchanger. Since the SILobjective is thermally coupled to the base, and the base is directly inthe fluid path to the heat exchanger, the temperature of the lower partof the SIL objective is also heated or cooled by the base.

To manage the temperature gradients across the lens when the IC beingprobed is hot, the SIL heat exchanger can be used with a cold fluid. Tomanage the temperature gradients when the IC is cold, the heat exchangercan be used with a warm fluid. The thermal pump can be operated tomaintain the fluid temperature within a predetermined range. This can bedone based on the temperature of the fluid returning to the pump, bysensing temperatures of the lens, IC, and other parts of the system orby a combination. In addition, the thermal pump can be operated toanticipate temperature changes. Information about a thermal test can beprovided to the heat pump so that, for example, the SIL is warmed beforethe IC is cooled or vice versa.

As mentioned above, the heat exchanger has micro-channels 34 and ismounted around the outer diameter of the SIL objective 14 near the topof the SIL. This is the part of the objective that is most affected bythe temperature of the die and convective cooling nozzle. For coldtemperature debug cycles, hot re-circulated fluid up to, for example 60C, can be circulated through the micro-channels to warm the end of theobjective. This prevents heat conduction by providing a thermal barrierfrom the cold, for example −130 C air environment delivered by theconductive, convective cooling nozzle surrounding the SIL tip assembly.The fluid in the SIL heat exchanger absorbs the heat loss or gain fromthe air instead of the SIL objective absorbing that heat. The fluid inthe SIL heat exchanger is then re-circulated to desorb the heat loss orgain from the air and maintain its temperature. A variety of differentfluids with sufficient heat capacity can be used in the heat exchanger.Water or various other known coolants are suitable choices.

In this way, the SIL heat exchanger minimizes unwanted temperaturegradients along the vertical direction of the SIL objective, as shown inFIG. 4, that could degrade image quality. In addition, the SIL heatexchanger reduces the time of image drift, which occurs when reachingthermal equilibrium due to expansion and contraction of the objectivematerial.

In the same way, when the die is operated at high temperature and whenthe convective cooling nozzle is used instead to heat the die, coldfluid can be pumped through the heat exchanger. This will have a similarbut opposite effect. The cold fluid will act as a thermal barrier to thehot environment around the tip. This will maintain a more consistenttemperature for the objective, protecting the objective from damage andimproving image quality.

In addition, FIG. 4A shows the passageways to the air gap between theSIL tip and the SIL objective. As mentioned above, in operation, thisarea is prone to condensation when the temperature of the SIL tip fallsbelow the dew point of the air inside the SIL. This condensation canform as condensation or icing on any of the SIL optics used for imagingand waveform acquisition. To prevent condensation, a dry nitrogen N2 gaspurge or compressed dry air or other purge gas can be used to evacuateany moisture in the air gap, dropping the dew point below the SIL tiptemperature. Either a pump or a source and exhaust system can be useddepending on the application.

FIG. 4B shows another embodiment similar to FIG. 4A but with anadditional fluid thermal pump 59. The additional thermal pump controlsthe flow of fluid through the base 61 of the debug test tool. The baseis fitted with channels 60 into which the pump 59 circulates a fluid ata particular temperature and flow rate. The thermal pump is coupled to asecond thermal sensor 58 placed near the bottom of the SIL objective.The lower thermal management system is used to heat or cool the base ofthe debug tool. Since the SIL objective is thermally coupled to thebase, the temperature of the lower part of the SIL objective can beheated or cooled using the lower thermal management system.

When the die is operated at very hot or cold temperatures, the window 16is heated or cooled because of it direct contact or very close proximityto the die. This heating or cooling is conducted through the tipassembly 12 and then into the SIL objective 14. The top of the SILobjective, accordingly is being heated or cooled. The bottom of the SILobjective, however, is further away from the die and the SIL tipassembly and has much less exposure to the extreme temperatures. Thebottom part of the SIL objective is only heated or cooled by the toppart of the SIL as the heat or cold is conducted through the SILobjective and through the housings and casings that surround the SILobjective. If the upper and lower parts of the SIL are too different intemperature, then the SIL objective can be destroyed.

In the illustrated example, the upper thermal sensor 54 providestemperature information about the top of the SIL objective and the lowerthermal sensor provides temperature information about the bottom of theSIL objective. The temperature information can be sent only to therespective upper and lower thermal pumps to regulate the temperature ofeach respective portion of the objective. Typically, the lower part ofthe SIL is at a more moderate temperature and requires less compensationthan the upper system. Alternatively, the temperature information can becombined to determine the temperature gradient or difference between theupper and lower parts of the SIL.

FIG. 5 provides a graphical representation of results that can beobtained under different operating conditions using the debug tooldescribed and shown above. This chart shows temperature ranges both withand without the upper heat exchanger in use. The air temperature line 64shows the temperature of the air around the die. This temperature can bemeasured in a variety of different ways, including by measuring the airretrieved from the convective cooling nozzle for recirculation.Deactivating the heat exchanger and N2 purge, and running fluid throughthe SIL mounting block, the temperature of the SIL is shown by the linemarked “SIL w/o exchanger.”

The image captured by the SIL objective degrades when the SIL objectivereaches a temperature of 10 C at point 62. This corresponds to aconductive, convective air temperature of −10 C at point 64. Because theSIL tip assembly is in direct contact with the IC being probed, the SILtip assembly will be much colder than the SIL objective. This can causeicing and condensation. The N2 purge described above can reduce thiseffect.

With the SIL heat exchanger and purge activated, the SIL temperature asshown by the line marked “SIL internal” was kept at 30 C at point 66 andthe image had no degradation all the way down to a junction temperatureof −25 C and an air temperature of −100 C (not shown). The SIL internaltemperature can be measured by a thermal diode near or in direct thermalcontact with the SIL.

The chart of FIG. 5 also indicates the use of two different temperaturesfor the fluid circulated through the heat exchanger. At an airtemperature of −80 C at point 68, the SIL heat exchanger can maintainthe SIL internal temperature above 30 C by using a fluid re-circulationtemperature of, for example, 60 C at line 70. Without the SIL heatexchanger, the SIL internal temperature can reach −20 C. This is outsidethe acceptable temperature range of the SIL which is designed for use atroom temperature of about 25 C. At higher temperatures, the heatexchanger fluid can be switched to 10 C. This keeps the SIL frombecoming too hot and can maintain the SIL within its normal temperatureoperating range. In the chart of FIG. 5, this range is below 60 C atpoint 74 and is maintained even at junction (or DUT) and airtemperatures as high as 150 C.

FIG. 6 is a simplified block diagram showing one possible implementationof an entire debug and test tool incorporating embodiments of thepresent invention. In FIG. 6, the die to be tested 51 is mounted to asocket 50 of a tester 76. The tester operates the die simulating normaloperation or operating specific test routines. It sends data and controlsignals into the die and then measures the response of the die. Thetester can include special probes to examine internal signals or it canbe coupled only to the pins that are used in normal operations.

The SIL 10 is typically positioned in physical contact to the die sothat it can examine the operation of the die. A laser or other opticalprobe source 82 is optically coupled to the SIL objective and to animaging array 80, such as a CCD (Charge Coupled Device) is alsooptically coupled to the laser. For many tests, the laser sends pulsesor signal to the die and their reflection is imaged onto the CCD.However, for other tests, the die is passively imaged without use of thelaser. The optical components 80, 82 are coupled to a test controller 84that drives the tests and evaluates the results.

The test controller can also be coupled to the convective cooling system56 described above, to control or manage the temperature of the die andto the SIL thermal management system 78. The SIL thermal managementsystem can include the heat exchanger or the gas purge system or both asdescribed above in the context of FIGS. 3A, 3B, and 3C. The thermalmanagement system receives temperature information from a thermal sensor54 at or near the SIL objective. Either the convective cooling system orthe thermal management system can be operated and controlled by the testcontroller or separately from the test controller. A different automatedsystem can be used, or the components can be operated manually.

The test controller 84 can use general purpose or specific hardware andtypically includes a display, a user interface and programming tocontrol a variety of different tests. Alternatively, the tester 76 cancontrol the tests and the test controller can be used only to observeand capture the results of the imaging by the CCD.

The enhanced thermal control described above greatly improves postsilicon debugging at 32 nm process technologies and smaller. It is alsouseful for ultra mobile products with extended temperature productspecifications.

Many modifications and variations are possible in light of the aboveteachings. Various equivalent combinations and substitutions may be madefor various components and operations shown in the figures. The scope ofthe invention is not to be limited by this detailed description, butrather by the claims appended hereto.

The example lens tip, lens objective, pumps, fluids and pathways and theorder of construction and operation described above are provided only asexamples. The configurations shown may be varied from implementation toimplementation depending upon numerous factors, such as priceconstraints, performance requirements, technological improvements, orother circumstances. The components shown may be exchanged for theirlogical or mechanical equivalents. Embodiments of the invention may beapplied to a wide range of electronic testing systems and opticaltesting systems, the illustrated configurations are provided only asexamples.

In the description above, numerous specific details are set forth.However, it is understood that embodiments of the invention may bepracticed without these specific details. For example, well-knownequivalent components may be substituted in place of those describedherein. In addition, components may be removed or added to theillustrated circuit to improve results or add additional functions. Inother instances, well-known circuits, structures and techniques have notbeen shown in detail to avoid obscuring the understanding of thisdescription.

While the embodiments of the invention have been described in terms ofexamples, those skilled in the art may recognize that the invention isnot limited to the embodiments described, but may be practiced withmodification and alteration within the spirit and scope of the appendedclaims. The description is thus to be regarded as illustrative insteadof limiting.

1. A method comprising: applying a lens tip assembly of a solidimmersion lens to a device under test; focusing an image of the deviceunder test on an optical probe through an objective of the solidimmersion lens; applying a first thermally controlled fluid to a firstheat exchanger thermally coupled to the objective near the lens tipassembly, the temperature of the thermally controlled fluid beingdetermined based at least in part on the temperature of the lens tipassembly; and applying a second thermally controlled fluid to a secondheat exchanger thermally coupled to the objective farther from the lenstip assembly than the first heat exchanger, to independently alternatelyheat or cool a portion of the objective different from that of the firstheat exchanger.
 2. The method of claim 1, further comprising measuringthe temperature of the objective and controlling the temperature of thefluid in the first heat exchanger based on the measurement.
 3. Themethod of claim 2, wherein measuring the temperature comprises measuringthe temperature through a thermal sensor coupled to the objective. 4.The method of claim 1, further comprising pumping the fluids through therespective first and second heat exchangers.
 5. The method of claim 1,wherein the objective has an exterior surface and the second heatexchanger is thermally coupled to the exterior surface.
 6. The method ofclaim 1, wherein the first heat exchanger comprises a plurality of fluidchannels around an outside surface of the objective proximate the lenstip assembly.
 7. The method of claim 1, further comprising purgingmoisture from a chamber between the lens tip assembly and the objective.8. The method of claim 7, wherein purging moisture comprises pumping apurge gas into the chamber.
 9. The method of claim 8, wherein the purgegas comprises at least one of compressed dry air, nitrogen, and amoisture free, inert fluid.
 10. The method of claim 1, furthercomprising spray cooling the exterior of the lens tip assembly.
 11. Themethod of claim 1, further comprising heating the objective through thesecond heat exchanger when the lens tip assembly is cool and cooling theobjective when the lens tip assembly is hot.
 12. A method comprising:applying a lens tip assembly of a solid immersion lens to a device undertest; focusing an image of the device under test on an optical probethrough an objective of the solid immersion lens; applying a thermallycontrolled fluid to a heat exchanger thermally coupled to the objective,the temperature of the thermally controlled fluid being determined basedat least in part on the temperature of the lens tip assembly; andpurging moisture from a chamber between the lens tip assembly and theobjective.
 13. The method of claim 12, wherein purging moisturecomprises pumping a purge gas into the chamber.
 14. The method of claim13, wherein purging moisture comprises pumping a purge gas into thechamber.
 15. The method of claim 14, wherein the purge gas comprises atleast one of compressed dry air, nitrogen, and a moisture free, inertfluid.
 16. The method of claim 12, further comprising spray cooling theexterior of the lens tip assembly.
 17. The method of claim 12, furthercomprising measuring the temperature of the objective and controllingthe temperature of the fluid in the heat exchanger based on themeasurement.
 18. A method comprising: applying a lens tip assembly of asolid immersion lens to a device under test; focusing an image of thedevice under test on an optical probe through an objective of the solidimmersion lens; applying a thermally controlled fluid to a heatexchanger thermally coupled to the objective, the temperature of thethermally controlled fluid being determined based at least in part onthe temperature of the lens tip assembly; measuring the temperature ofthe objective and controlling the temperature of the fluid in the heatexchanger based on the measurement; pumping the fluid through the heatexchanger; and purging moisture from a chamber between the lens tipassembly and the objective.
 19. The method of claim 18, wherein purgingmoisture comprises pumping a purge gas into the chamber.
 20. The methodof claim 18, further comprising spray cooling the exterior of the lenstip assembly.
 21. The method of claim 18, wherein pumping the fluidcomprises pumping the fluid through a plurality of fluid channels aroundan outside surface of the objective proximate the lens tip assembly.